Design for Manufacturability with Advanced Lithography Munzinger Str. 9 Universität Kassel (Gesellschaftswissenschaften)

Universität Kassel (Gesellschaftswissenschaften)

Lawrence Kimmel

Pharmaceutical manufacture is very exacting – for example

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Design for Manufacturability with Advanced Lithography Munzinger Str. 9 Universität Kassel (Gesellschaftswissenschaften)This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL). The authors describe in detail a set of algorithms methodologies to resolve issues in modern design for manufacturability problems with advanced lithography. Unlike books that discuss DFM from the product level or physical manufacturing level, this book describes DFM